Introduction to Microelectromechanical Systems (E C E 542) Syllabus
Course Learning Outcomes
Course Learning Outcome
Students will understand and be able to design fabrication process flows for microelectromechanical systems (MEMS)
Students will understand the design, fabrication and characterization of MEMS devices and systems
Students will be able to design basic MEMS devices especially microsensors.
Introduction to Microelectromechanical Systems
E C E 542
( 3 Credits )
Introduction to MEMS technology, devices and systems. Fundamentals of MEMS in fabrication, process integration, material mechanics of MEMS structures, sensors and actuators. Main topics in MEMS - microfluidics, optical MEMS, RF MEMS, BioMEMS, packaging, and CAD.
CE 335 or 340, or cons inst
Department: ELECTRICAL AND COMPUTER ENGR College: College of Engineering