University of Wisconsin Madison
Introduction to Microelectromechanical Systems (E C E 542) Syllabus
Course Learning Outcomes
    Course Learning Outcome
  • 1
    Students will understand and be able to design fabrication process flows for microelectromechanical systems (MEMS)
  • 2
    Students will understand the design, fabrication and characterization of MEMS devices and systems
  • 3
    Students will be able to design basic MEMS devices especially microsensors.
Details
Introduction to Microelectromechanical Systems
E C E 542 ( 3 Credits )
Description
Introduction to MEMS technology, devices and systems. Fundamentals of MEMS in fabrication, process integration, material mechanics of MEMS structures, sensors and actuators. Main topics in MEMS - microfluidics, optical MEMS, RF MEMS, BioMEMS, packaging, and CAD.
Prerequisite(s)
CE 335 or 340, or cons inst
Department: ELECTRICAL AND COMPUTER ENGR
College: College of Engineering
Instructor
Instructor Name
Instructor Campus Address
instructorEmail@emailaddress.edu
Contact Hours
2.5
Course Coordinator
HONGRUI JIANG
Text book, title, author, and year

Hongrui Jiang, ECE542 course notes.

Supplemental Materials
None
Required / Elective / Selected Elective
Selected Elective
ABET Program Outcomes Associated with this Course
Program Specific Student Outcomes
 
Brief List of Topics to be Covered
  1. Basic MEMS fabrication and packaging techniques
  2. Mechanical microsensors and microactuators
  3. Inertial sensors and pressure sensors
  4. Thermal transducers
  5. Magnetic transducers
  6. Optical Microdevices and Microsystems
  7. Wireless sensing and telemetry
  8. Microfluidics, lab on a chip and bioMEMS
  9. Radio-frequency MEMS
Additional Information
 
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