E C E 528 Syllabus
Plasma Processing and Technology
COURSE INFORMATION
Plasma Processing and Technology
E C E 528 ( 3.0 "credits" )
Description
Introduction to basic understanding and techniques. Plasma processing of materials for semiconductors, polymers, plasma spray coatings, ion implantation, etching, arcs, extractive metallurgy and welding. Plasma and materials diagnostics. Enroll Info: Physics 322 or ECE 320 or equiv or cons inst
Prerequisite(s)
None
Department: ELECTRICAL AND COMPUTER ENGR
College: College of Engineering
Contact Hours
 
Canvas Course URL
Term Name [Term Code]
Term Start Date: dd-mm-yyyy  Term End Date: dd-mm-yyyy
Course Requirement Level
How the Credit Hours are Met
INSTRUCTORS AND TEACHING ASSISTANTS
Instructor
No Instructor
A primary instructor has not been assigned to this course.
Instructor Availability
 
TA Office Hours
 
GRADING AND COURSE MATERIALS
Course Learning Outcomes (CLOs)
  • 1
    Specify or establish plasma properties over a wide parameter range.
    [C001]
  • 2
    Explain the concepts of thermionic emission, secondary emission, ionization, charge exchange, confinement, and stability.
    [C002]
  • 3
    Use a combination or resources (class text, class notes and literature) to solve problems.
    [C003]
  • 4
    Solve problems involving DC (hot cathode, magnetron, arc jet) and RF (capacitive, inductive, helicon, surface wave, arc jet) sources.
    [C004]
  • 5
    Solve problems and develop designs for systems involving plasma etching and thin and thick film deposition.
    [C005]
  • 6
    Write a paper based on literature survey of a particular plasma processing technique.
    [C006]
Brief List of Topics To Be Covered
 
Discussion Sessions
 
Laboratory Sessions
 
Required Textbook, Software, & Other Course Materials
 
Grading
 
EXAMS, QUIZZES, PAPERS & OTHER MAJOR GRADED WORK
Exams, Quizzes, Papers & Other Major Graded Work
 
Homework & Other Assignments
 
OTHER COURSE INFORMATION
Other Course Information
 
ACADEMIC POLICIES
ACADEMIC INTEGRITY

By enrolling in this course, each student assumes the responsibilities of an active participant in UW-Madison’s community of scholars in which everyone’s academic work and behavior are held to the highest academic integrity standards. Academic misconduct compromises the integrity of the university. Cheating, fabrication, plagiarism, unauthorized collaboration, and helping others commit these acts are examples of academic misconduct, which can result in disciplinary action. This includes but is not limited to failure on the assignment/course, disciplinary probation, or suspension. Substantial or repeated cases of misconduct will be forwarded to the Office of Student Conduct & Community Standards for additional review. For more information, refer to https://conduct.students.wisc.edu/academic-integrity/

ACCOMMODATIONS FOR STUDENTS WITH DISABILITIES

McBurney Disability Resource Center syllabus statement: “The University of Wisconsin-Madison supports the right of all enrolled students to a full and equal educational opportunity. The Americans with Disabilities Act (ADA), Wisconsin State Statute (36.12), and UW-Madison policy (Faculty Document 1071) require that students with disabilities be reasonably accommodated in instruction and campus life. Reasonable accommodations for students with disabilities is a shared faculty and student responsibility. Students are expected to inform faculty [me] of their need for instructional accommodations by the end of the third week of the semester, or as soon as possible after a disability has been incurred or recognized. Faculty [I], will work either directly with the student [you] or in coordination with the McBurney Center to identify and provide reasonable instructional accommodations. Disability information, including instructional accommodations as part of a student's educational record, is confidential and protected under FERPA.” http://mcburney.wisc.edu/facstaffother/faculty/syllabus.php

DIVERSITY & INCLUSION

Institutional statement on diversity: “Diversity is a source of strength, creativity, and innovation for UW-Madison. We value the contributions of each person and respect the profound ways their identity, culture, background, experience, status, abilities, and opinion enrich the university community. We commit ourselves to the pursuit of excellence in teaching, research, outreach, and diversity as inextricably linked goals.


The University of Wisconsin-Madison fulfills its public mission by creating a welcoming and inclusive community for people from every background – people who as students, faculty, and staff serve Wisconsin and the world.” https://diversity.wisc.edu/

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