Integrated Circuit Fabrication Laboratory (E C E 549) Syllabus
Course Learning Outcomes
Course Learning Outcome
Students will be able to create partial/full process flow for creating semiconductor devices starting from bare wafer using techniques typical for semiconductor manufacturing such as lithography, oxidation, chemical vapor deposition, dry/wet etching etc.
Students will understand operation and will be able to operate various tools used in semiconductor device fabrication such as spinners, mask aligner, furnace etc.
Students will be able to use mathematical models to calculate details related to manufacturing or characterization of semiconductor devices.